Temperature compensated orientation of berlinite for surface aco

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310360, H01L 4108

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045118175

ABSTRACT:
A piezoelectric wafer of single crystal berlinite, having a surface defined by an X-axis boule cut at about 85.degree., provides a improved substrate for a surface acoustic wave device. The 85.degree. cut angle is relatively easy to fabricate, provides excellent temperature compensation in a range form 20.degree. C. to 100.degree. C., and has high piezoelectric coupling coefficient.

REFERENCES:
patent: 4109172 (1978-08-01), O'Connell
patent: 4382840 (1983-05-01), Chai et al.
Acoustic Surface Waves, by G. S. Kino et al., Scientific American, Oct. 1972.
IEEE Trans. Sonics and Ultrasonics, vol. SU-23, No. 2, (Mar. 1976) "Elastic Constants and Thermal Expansion of Berlinite"-Chang et al., pp. 127-135.
IEEE Trans. Sonics and Ultrasonics, vol. SU-23, No. 6 (Nov. 1977) "High Piezoelectric Coupling Temperature Compensated Cuts of Berlinite (AIPO.sub.4) for SAW Applications", O'Connell et al. pp. 376-384.
Ferroelectric, 1982, vol. 42, "Piezoelectric Crystals for Surface Acoustic Waves", Henaff et al., pp. 161-180.
J. Applied Physics, vol. 48, No. 3, (Mar. 1977) "Berlinite, a Temperature-Compensated Material for Surface Acoustic Wave Applications"-Jhunjhunwala et al., pp. 887-892.

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