Temperature compensated gallium arsenide surface acoustic wave d

Details Temperature compensated gallium arsenide surface acoustic wave d Temperature compensated gallium arsenide surface acoustic wave d

1980-11-03

1982-08-17

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313B, 310313D, 310346, 333195, H01L 4108

Patent

active

043451764

ABSTRACT:
Temperature compensation is provided to a surface acoustic wave device including acoustoelectric transducers (12, 14) formed on a surface of a gallium arsenide substrate (10), by a composite layer including silicon dioxide (18, 26) and a mass loading metal (20, 24), which may be gold, titanium and gold, or other metals having Rayleigh wave velocities lower than that of gallium arsenide, such as silver and platinum.

REFERENCES:
patent: 3795879 (1974-03-01), Whitehouse et al.
patent: 3965444 (1976-06-01), Willingham et al.
patent: 4223286 (1980-09-01), Ono et al.
patent: 4233573 (1980-11-01), Grudkowski

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