Temperature compensated alignment system

Details Temperature compensated alignment system Temperature compensated alignment system

1979-01-08

1980-05-13

Griffin, Donald A.

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

G03B 2752

Patent

active

042026237

ABSTRACT:
A temperature control system for adjusting the temperature of a projection mask to cause it to align optically with a wafer, and thereafter, to automatically maintain the temperature differential between the mask and wafer constant.

REFERENCES:
patent: 3531196 (1970-09-01), Kosanke et al.
patent: 3610750 (1971-10-01), Lewis et al.
patent: 3826569 (1974-07-01), Sakamaki et al.
patent: 3937579 (1976-02-01), Schmidt
patent: 4011011 (1977-03-01), Hemstreet et al.
patent: 4147429 (1979-04-01), Lysle

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