Temperature coefficient compensated pressure transducer

Measuring and testing – Fluid pressure gauge – With pressure and/or temperature compensation

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Details

73721, 73727, 338 3, 338 4, 338 42, G01L 708, G01L 906, G01L 1904

Patent

active

047262320

ABSTRACT:
A pressure transducer, which includes a silicon diaphragm with ion-implanted resistors in Wheatstone Bridge configuration and in insulating layer covering the diaphragm, is provided with temperature compensation for differences in thermal expansion coefficients of the layers by depositing a layer of aluminum onto the central portion of the diaphragm.

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