Measuring and testing – Fluid pressure gauge – With pressure and/or temperature compensation
Patent
1986-06-02
1988-02-23
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
With pressure and/or temperature compensation
73721, 73727, 338 3, 338 4, 338 42, G01L 708, G01L 906, G01L 1904
Patent
active
047262320
ABSTRACT:
A pressure transducer, which includes a silicon diaphragm with ion-implanted resistors in Wheatstone Bridge configuration and in insulating layer covering the diaphragm, is provided with temperature compensation for differences in thermal expansion coefficients of the layers by depositing a layer of aluminum onto the central portion of the diaphragm.
Gould Inc.
Woodiel Donald O.
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