Temperature clamped anti-contamination and collimating devices f

Details Temperature clamped anti-contamination and collimating devices f Temperature clamped anti-contamination and collimating devices f

1995-01-09

1998-05-26

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419212, 20429809, C23C 1434

Patent

active

057559368

ABSTRACT:
In a thin film process system, an anti-contamination device, anti-flake shield or collimator plate, is fit to a process chamber. By maintaining a temperature differential between the chamber body and the device, or between the device and any adapter used to conform the device to the chamber apparatus, the device expands to maintain a substantially sealing press fit to the chamber body. The temperature differential can be maintained even when the process is finished until it is time to remove the device for cleaning or disposal and replacement.

REFERENCES:
patent: 4001928 (1977-01-01), Schweiso
patent: 4126758 (1978-11-01), Krumme
patent: 4416759 (1983-11-01), Harra et al.
patent: 4933066 (1990-06-01), Katsura et al.
patent: 5112467 (1992-05-01), Zejda
patent: 5240580 (1993-08-01), Henderson et al.
patent: 5254236 (1993-10-01), Kinokiri et al.

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