Temperature and pressure transducer

Details Temperature and pressure transducer Temperature and pressure transducer

2011-01-04

2011-01-04

Koval, Melissa J (Department: 2831)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C455S040000, C073S708000, C073S718000, C166S066000, C166S250010

Reexamination Certificate

active

07863907

ABSTRACT:
Methods for making and systems employing pressure and temperature sensors are described. Embodiments include a capacitive element including a first conductor plate and a second conductor plate. Each plate includes a conductor layer formed on a substrate. In a pressure sensor embodiment, seal is positioned at or near the edges of the conductor plates, and a gas retained in a gap defined between the plates. In a temperature sensor embodiment, the gap defined between the plates is in fluid communication with the external environment.

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