Temperature adjustment apparatus, exposure apparatus having...

Details Temperature adjustment apparatus, exposure apparatus having... Temperature adjustment apparatus, exposure apparatus having...

2007-02-13

2007-02-13

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S072000

Reexamination Certificate

active

11407059

ABSTRACT:
An exposure apparatus including an illumination optical unit for irradiating exposure light, a stage for mounting a substrate and moving the substrate, a driving unit for driving the stage, a heater for applying heat to the stage, and a heat generation amount control unit for controlling heat generation amount to suppress a temperature change of the stage before or after driving of the driving unit or a temperature change of the stage before or after irradiating of the illumination optical unit.

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