Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-06-20
2006-06-20
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S072000
Reexamination Certificate
active
07064804
ABSTRACT:
An exposure apparatus having an illumination optical unit for emitting exposure light, a stage for supporting a substrate, and a main controller for controlling exposure operation of transferring a pattern formed on a master to the substrate. The apparatus includes a controller for controlling a Peltier element on the basis of an operation control signal from the main controller, and controlling heat movement by the Peltier element, the Peltier element being set at or near an object to be temperature-controlled in real time.
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Translation of Japanese Patent document 07-302747 filed in Applicant's IDS.
Translation of Japanese Patent document 07-302124 filed in Applicant's IDS.
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