Temperature adjustment apparatus, exposure apparatus having...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control

Reexamination Certificate

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Details

C355S053000, C355S072000

Reexamination Certificate

active

07064804

ABSTRACT:
An exposure apparatus having an illumination optical unit for emitting exposure light, a stage for supporting a substrate, and a main controller for controlling exposure operation of transferring a pattern formed on a master to the substrate. The apparatus includes a controller for controlling a Peltier element on the basis of an operation control signal from the main controller, and controlling heat movement by the Peltier element, the Peltier element being set at or near an object to be temperature-controlled in real time.

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patent: 0 822 473 (1998-02-01), None
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patent: 7-302747 (1995-11-01), None
patent: 2003-68600 (2003-03-01), None
Translation of Japanese Patent document 07-302747 filed in Applicant's IDS.
Translation of Japanese Patent document 07-302124 filed in Applicant's IDS.

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