Temperature adjusting system and exposure apparatus...

Details Temperature adjusting system and exposure apparatus... Temperature adjusting system and exposure apparatus...

2006-12-12

2006-12-12

Nguyen, Henry Hung (Department: 2851)

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C355S030000

Reexamination Certificate

active

07148955

ABSTRACT:
A temperature adjusting system includes a chamber, a cooler which cools an inert gas to be supplied to the chamber, a circulating path which circulates the inert gas through the chamber and the cooler, a shut-off valve arranged in the circulating path between the chamber and an outlet port of the cooler, and a shut-off valve arranged in the circulating path between the chamber and an inlet port of the cooler.

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patent: 09-246140 (1997-09-01), None
patent: 11-312640 (1999-11-01), None
Japanese Office Action dated Aug. 5, 2005, issued in corresponding Japanese patent application No. 2002-290146.

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