Temperature adjusting system and exposure apparatus...

Details Temperature adjusting system and exposure apparatus... Temperature adjusting system and exposure apparatus...

2006-01-17

2006-01-17

Nguyen, Henry Hung (Department: 2851)

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C355S030000

Reexamination Certificate

active

06987554

ABSTRACT:
An apparatus including a chamber, a cooler, a circulating path, a first path, a second path, a first shut-off valve, and a second shut-off valve. The cooler cools an inert gas to be supplied to the chamber. The inert gas flows through the chamber and the cooler in the circulating path. The first path, connected to the circulating path at a first position downstream of an outlet port of the cooler and upstream of the chamber, introduces air to the circulating path. The second path, connected to the circulating path at a second position downstream of the chamber and upstream of an inlet port of the cooler, exhausts gas in the chamber. The first shut-off valve, arranged in the circulating path upstream of the first position and downstream of the outlet port of the cooler, closes before the introduction of the air. The second shut-off valve, arranged in the circulating path downstream of the second position and upstream of the inlet port of the cooler, closes, to prevent the air from flowing to the cooler.

REFERENCES:
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patent: 6707529 (2004-03-01), Aoki et al.
patent: 2002/0094306 (2002-07-01), Hara et al.
patent: 2003/0151728 (2003-08-01), Nishi
patent: 9-246140 (1997-09-01), None
patent: 11-312640 (1999-11-01), None
Japanese Office Action dated Aug. 5, 2005, issued in corresponding Japanese patent application No. 2002-290146.

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