Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1996-08-08
1997-12-30
Nguyen, Kiet T.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
353102, 355 67, G21K 504
Patent
active
057033749
ABSTRACT:
A condenser lens system is provided for forming an effective circular source of NUV-DUV radiation which is the telecentric stop of the system and is characterized by a short focal length and higher marginal irradiance to compensate for marginal cosine losses. The system utilizes a long arc medium/low pressure mercury lamp which is surrounded by a large paraboloidal reflector and is mounted below the focal point of the reflector to generate a converging radiation beam directed to the condenser lens system. The system then projects the effective circular source of NUV-DUV radiation to a lens system comprising two plano convex lenses to convert the effective circular source into a collimated beam for out-of-contact printing of large substrates. The highly collimated and spatially coherent beam can be used to irradiate a telecentric objective for projection exposure on wafer steppers or flood exposure systems.
REFERENCES:
patent: 3860335 (1975-01-01), Caprari
patent: 4023904 (1977-05-01), Sheets
patent: 4348105 (1982-09-01), Caprari
patent: 4707609 (1987-11-01), Shimamura
patent: 4907029 (1990-03-01), Caprari
Actinic Systems, Inc.
Nguyen Kiet T.
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