Techniques for making and using a sensing assembly for a mass fl

Measuring and testing – Volume or rate of flow – Thermal type

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G01F 168

Patent

active

060620773

ABSTRACT:
The present invention provides a technique for making a sensing assembly for use in a mass flow controller. The technique includes providing separating terminals between windings on a sensor tube. The separating terminals allow secure and reliable electrical connections to be made to wire wound on the sensor tube, and act as standoffs that support the sensor tube about an insulative form.

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