Measuring and testing – Volume or rate of flow – Thermal type
Patent
1997-10-17
2000-05-16
Fuller, Benjamin R.
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
060620773
ABSTRACT:
The present invention provides a technique for making a sensing assembly for use in a mass flow controller. The technique includes providing separating terminals between windings on a sensor tube. The separating terminals allow secure and reliable electrical connections to be made to wire wound on the sensor tube, and act as standoffs that support the sensor tube about an insulative form.
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Fuller Benjamin R.
Thompson Jewel V.
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