Fishing – trapping – and vermin destroying
Patent
1992-11-20
1993-10-12
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 31, 437 61, 437 72, 437228, 148DIG135, H01L 21265
Patent
active
052525031
ABSTRACT:
Various techniques of forming isolation structures between adjacent diffusion regions are disclosed. In one technique, a thermally-grown oxide isolation structure is gouged out, and subsequent poly extending into the gouged out isolation structure is substantially level with the diffusion region. In another technique, a trench (bathtub) is formed, lightly oxidized, overfilled with polysilicon or amorphous silicon, gouged out, and thermally treated to form a substantially planar isolation structure. In another technique, an isolation structure exhibiting bird's-heads and bird's-beaks is polished until the bird's-beaks are removed. Gouging of the diffusion area may be permitted to occur. A bipolar transistor structure can be formed in the gouged diffusion area, and will exhibit reduced spacing between the intrinsic base and collector without proportionally reduced spacing between the extrinsic base and the collector.
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Hearn Brian E.
Linden Gerald E.
LSI Logic Corporation
Nguyen Tuan
Rostokes Michael D.
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