Technique to improve uniformity of large area field emission dis

Details Technique to improve uniformity of large area field emission dis Technique to improve uniformity of large area field emission dis

1995-12-29

1997-08-12

O'Shea, Sandra L.

Electric lamp and discharge devices

With luminescent solid or liquid material

Vacuum-type tube

313309, 313336, 445 50, 445 51, H01J 912, H01J 162, H01J 6304, H01J 146, H01J 2110

Patent

active

056568860

ABSTRACT:
Cold cathode passive matrix FEDs are fabricated by depositing a resistive layer on a substrate, and coated with a protective layer in which at least one hole is formed. Cathode material is deposited on the protective layer making direct contact with the resistive layer through the hole to form bases for the emitter tips which are subsequently etched from the cathode layer. The protective layer allows overetching of the cathode material to prevent tip-to-tip electrical shorts without attacking the underlying resistive layer.

REFERENCES:
patent: 3500102 (1970-03-01), Crost et al.
patent: 4940916 (1990-07-01), Borel et al.
patent: 5210472 (1993-05-01), Casper et al.
patent: 5212426 (1993-05-01), Kane
patent: 5359256 (1994-10-01), Gray
patent: 5394006 (1995-02-01), Liu
patent: 5548181 (1996-08-01), Jones
K. Yokoo, et al., "Active Control of Emission Current of Field Emitter Array", Revue Le Vide, les Couches Minces, Suppl. No. 271, Mar.-Apr. 1994.

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