Technique to fabricate chimney-shaped emitters for field-emissio

Details Technique to fabricate chimney-shaped emitters for field-emissio Technique to fabricate chimney-shaped emitters for field-emissio

1996-02-13

1998-07-14

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, H01J 902

Patent

active

057795142

ABSTRACT:
A new fabrication technology for the chimney-shaped metal field emission elements with a self-alignment process which makes the emitter structure symmetrical. This tectnology is based on the isotropic or anisotropic, wet or dry etching and then the sputtering deposition of the emither material as well as the wet etching of attaching silicon. The finished field emitters are with excellent uniformity and high reproducibility and are able to emit the current thirty times in magnitude higher than that from the conventional cone-shaped field emitters at the same electric field.

REFERENCES:
patent: 5145435 (1992-09-01), Ayers
patent: 5199917 (1993-04-01), MacDonald et al.
patent: 5643032 (1997-07-01), Cheng et al.

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