Technique for the measurement and calibration of angular positio

Details Technique for the measurement and calibration of angular positio Technique for the measurement and calibration of angular positio

1995-09-08

1998-03-03

Buczinski, Stephen C.

Optics: measuring and testing

Angle measuring or angular axial alignment

With photodetection remote from measured angle

25023113, 25023114, 25023117, 356 409, 356 28, G01C 300, G01B 1126, G01D 534

Patent

active

057241309

ABSTRACT:
The present invention relates to apparatus and methods for the precision measurement and calibration of a body such as a precision rotary table. It consists of at least one, or preferably a polygon of mirrors placed on the body or around a circumference of the precision rotating table and an interferometer instrumentation arranged on an optical path which includes the mirrors. The rotational angle of the body or table is continuously measured with high accuracy without being affected by bearing runout. An optical means for detecting actual positions of the body using a laser and razor blade means provides for simple and easy calibration of the body's position.

REFERENCES:
patent: 5103090 (1992-04-01), Weiner
patent: 5489984 (1996-02-01), Hariharan et al.
patent: 5585913 (1996-12-01), Hariharan et al.

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