Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Groove formation
Reexamination Certificate
2007-04-03
2007-04-03
Wilczewski, M. (Department: 2822)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Groove formation
C257S076000, C438S492000
Reexamination Certificate
active
10768747
ABSTRACT:
This invention pertains to electronic/optoelectronic devices with reduced extended defects and to a method for making it. The method includes the steps of depositing a dielectric thin film mask material on a semiconductor substrate surface; patterning the mask material to form openings therein extending to the substrate surface; growing active material in the openings; removing the mask material to form the device with reduced extended defect density; and depositing electrical contacts on the device.
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Eddy, Jr. Charles R.
Henry Richard
Holm Ronald
Koleske Daniel
Peckerar Martin
Guest Rae Lynn
Kap George A.
Karssek John J.
The United States of America as represented by the Secretary of
Wilczewski M.
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