Technique for nucleating b.c.c. tantalum films on insulating sub

Details Technique for nucleating b.c.c. tantalum films on insulating sub Technique for nucleating b.c.c. tantalum films on insulating sub

1976-05-13

1977-07-19

Kaplan, G. L.

Chemistry: electrical and wave energy

Processes and products

204192F, 361304, 361322, C25D 1126, H01G 1300

Patent

active

040367088

ABSTRACT:
A technique is described for depositing organic layers down to a fraction of a monolayer thickness upon insulating substrates by non-vacuum deposition techniques which permit the subsequent deposition of mechanically stable adherent films of b.c.c. tantalum of low resistivity. The deposited films permit the fabrication of low cost, high frequency performance tantalum thin film capacitors.

REFERENCES:
patent: 3258413 (1966-06-01), Pendergast
patent: 3723838 (1973-03-01), Kumagai
patent: 3808109 (1974-04-01), Schauer
patent: 3878079 (1975-04-01), Schauer
W. D. Westwood et al., Thin Solid Films, pp. 407-420, 5, No. 5/6, (1970).

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