Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Forming multiple superposed electrolytic coatings
Reexamination Certificate
2011-07-26
2011-07-26
Wilkins, III, Harry D (Department: 1723)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Forming multiple superposed electrolytic coatings
C204S230200, C205S102000, C205S104000, C205S170000
Reexamination Certificate
active
07985329
ABSTRACT:
By providing two or more consumable electrodes within a single reactor vessel, an alloy having a high degree of chemical ordering may be deposited in situ in that the current flows of the individual consumable electrodes are controlled to obtain a substantially layered deposition of the two or more metals. Hence, especially in copper-based metallization layers, the advantage of enhanced resistance against electromigration offered by alloys may be achieved without unduly reducing the overall conductivity.
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Marxsen Gerd
Preusse Axel
Advanced Micro Devices , Inc.
Ripa Bryan D.
Wilkins, III Harry D
Williams Morgan & Amerson P.C.
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