Technique for doping MOCVD grown crystalline materials using fre

Details Technique for doping MOCVD grown crystalline materials using fre Technique for doping MOCVD grown crystalline materials using fre

1991-02-19

1993-04-13

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437167, 437168, 437102, 437104, 437965, 156605, 148DIG110, H01L 2120, H01L 2136

Patent

active

052022838

ABSTRACT:
Method for organic free radical, including aliphatic radical, transport of dopant species for precise, predetermined, and reproducible doping concentrations to control electrical properties for chemical vapor deposition grown materials.

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