Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-06-03
2008-12-16
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
07466404
ABSTRACT:
A method for testing a substrate by using a photoemission microscope is provided which includes providing the substrate and applying a reverse bias voltage to the substrate. The method further includes detecting light emissions from a top surface of the substrate and characterizing viability of the substrate from the detection of the light emissions.
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Lopez Leoncio D.
McElfresh David K.
Melanson Robert
Vacar Dan
Akanbi Isiaka O
Chowdhury Tarifur R.
Martine & Penilla & Gencarella LLP
Sun Microsystems Inc.
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