Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Frequency of cyclic current or voltage
Patent
1977-07-28
1978-05-02
Krawczewicz, Stanley T.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
Frequency of cyclic current or voltage
G01R 2704
Patent
active
040877450
ABSTRACT:
This invention is directed to a device and method for measuring carrier mlity and density in thin-film semiconductor materials such as those used in thin-film circuitry, particularly in high-frequency microwave devices. The device includes a microwave system in combination with a variable magnetic field in which the material to be measured is positioned at an E-field maximum in a shorted section of waveguide, which shorted section is in the magnetic field. The magnetic-field dependence of the reflected power is then monitored. The carrier mobility is derived from the value of the magnetic field at the point at which the microwave power reflected from the material falls to one-half of the reflected microwave power when the magnetic field value is zero. The electron density may be determined from the change in amplitude of the signal between zero magnetic field and high fields by proper calibration.
REFERENCES:
patent: 2644930 (1953-07-01), Luhrs et al.
patent: 2714663 (1955-08-01), Norton
patent: 3090003 (1963-05-01), Rempel et al.
Kennedy, Jr. Thomas A.
McCombe Bruce D.
Crane Melvin L.
Krawczewicz Stanley T.
Schneider Philip
Sciascia R. S.
The United States of America as represented by the Secretary of
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