Technique for altering the profile of grating relief patterns

Details Technique for altering the profile of grating relief patterns Technique for altering the profile of grating relief patterns

1979-04-30

1980-12-23

Smith, John D.

Coating processes

Optical element produced

156600, 156643, 350 9630, 427 87, 427259, 427271, 430321, 430322, 430323, 430324, B05D 506

Patent

active

042411092

ABSTRACT:
An oblique shadow deposition technique for altering the profile of grating relief patterns on surfaces is described. In one aspect the technique essentially represents a method whereby a series of grating masks may be superimposed in precise registration with each other. By appropriate choice of deposition angle, deep grooves may be generated from shallow profiles, rounded or sinusoidal profiles may be transformed to structures with planar vertical walls, and symmetric profiles may be made asymmetric.

REFERENCES:
patent: 3211570 (1965-10-01), Salisbury
patent: 3865625 (1975-02-01), Cho et al.
patent: 3904462 (1975-09-01), Dimigen et al.
patent: 3930065 (1975-12-01), Baker et al.
patent: 4013465 (1977-03-01), Clapham et al.
patent: 4100313 (1978-07-01), Hammer et al.
patent: 4171234 (1979-10-01), Nagata et al.
Tsang et al., "Growth of GaAs-Gai-xAlxAs . . . ", Applied Physics Letters, vol. 30, No. 6, Mar. 1977.

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