Target support assembly

Details Target support assembly Target support assembly

2003-06-20

2010-10-12

Nguyen, Nam X (Department: 1795)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298020, C204S298210

Reexamination Certificate

active

07811429

ABSTRACT:
The invention relates to a target support assembly (1) comprising a support (2), on which a target lining is arranged. In order to simplify the production of the target lining or of the target support assembly and/or the placement of the target lining on the support, the target lining is formed by a target sleeve (4) that is slid onto the support (2). At least one clamping element (5) is placed, while actively clamping, between the support (2) and the target sleeve (4).

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patent: WO 97/15697 (1997-05-01), None
patent: WO 02/20866 (2002-03-01), None

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