Target supplier

Details Target supplier Target supplier

2007-03-19

2009-11-10

Vanore, David A (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S503100, C250S493100, C250S492100

Reexamination Certificate

active

07615766

ABSTRACT:
A target supplier accelerates a target material injected from a nozzle such that a velocity of the target material after accelerated is kept within a predetermined range. The target supplier includes: a target nozzle that injects a target material in a liquid droplet state or solid particle state; an electric charge supplying unit that supplies electric charge to the target material; a charge amount measuring unit that measures an amount of the electric charge supplied to the target material by the electric charge supplying unit; a control unit that controls the electric charge supplying unit in a feedback manner based on a measurement result obtained by the charge amount measuring unit; and an accelerator that accelerates the target material supplied with the electric charge by the electric charge supplying unit.

REFERENCES:
patent: 7361918 (2008-04-01), Akins et al.
patent: 7394083 (2008-07-01), Bowering et al.
patent: 7405416 (2008-07-01), Algots et al.
patent: 7476884 (2009-01-01), Gaebel et al.
patent: 7525111 (2009-04-01), Bowering
patent: 2003/0189176 (2003-10-01), Chichkov et al.
patent: 2004/0238762 (2004-12-01), Mizoguchi et al.
patent: 2005/0205810 (2005-09-01), Akins et al.
patent: 2006/0176925 (2006-08-01), Nakano
patent: 2007/0001130 (2007-01-01), Bykanov et al.
patent: 2008/0017801 (2008-01-01), Fomenkov et al.
patent: 2003-297737 (2003-10-01), None

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