Target plate for cathode disintegration

Details Target plate for cathode disintegration Target plate for cathode disintegration

1986-07-09

1988-05-31

Niebling, John F.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

2041921, C23C 1434

Patent

active

047479272

ABSTRACT:
Cathode disintegration targets which during sputtering are exposed to a very high thermal load have heretofore been pressed against a cooling support from the side to be sputtered by means of bars and screws, to cool them. According to invention it is proposed to make the target plate in several parts and to provide on the sides where the individual parts abut mutually correlated cutouts, pairs of which form a cavity into which an auxiliary element, preferably a plate with threaded bores, can be inserted for attachment from the cooling support side.

REFERENCES:
patent: 3838031 (1974-09-01), Snaper
patent: 4414086 (1983-11-01), Lamont, Jr.
patent: 4421628 (1983-12-01), Quaderer
patent: 4428816 (1984-01-01), Class et al.
patent: 4448652 (1984-05-01), Pachonik
patent: 4485000 (1984-11-01), Kawaguchi et al.
patent: 4515675 (1985-05-01), Kieser et al.
patent: 4517070 (1985-05-01), Kisner

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