Target mounting-demounting arrangement

Details Target mounting-demounting arrangement Target mounting-demounting arrangement

1995-03-27

1997-10-14

Weisstuch, Aaron

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429812, 20429841, C23C 1434

Patent

active

056768109

ABSTRACT:
In order to permit a mounting and demounting of targets free of tools and essentially of friction, snap pins are provided on the system side which, when the target is inserted, automatically engage in a groove which is machined laterally into the target. A releasing slide permits the return of the pins. When the cooling system is acted upon by pressure, a heat transfer membrane is placed against the rear of the target and presses the target onto the snapped-in pins. The pins are released by a releasing slide after the cooling system is relieved from the pressure.

REFERENCES:
patent: 4820397 (1989-04-01), Fielder et al.
patent: 5259941 (1993-11-01), Munz
patent: 5421978 (1995-06-01), Schuhmacher et al.

Affiliated with

Also associated with

Rating

Target mounting-demounting arrangement does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Target mounting-demounting arrangement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Target mounting-demounting arrangement will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1552465