Target method and systems for bonding machines

Optics: measuring and testing – Refraction testing – Prism engaging specimen

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356138, 350 10, G01B 1126

Patent

active

040009483

ABSTRACT:
An improved method for placing the work point of a work piece in alignment with a line of action of a bonding tool is provided by interposing a partially reflecting mirror between a viewing microscope and the line of action of the tool, and projecting a target image on said mirror such that the image coincides with the line of sight to the work point of the tool.
The method can be practiced with an apparatus attached to the output end of a microscope and which includes an image projector formed by a light source and a transparency. Provision is made for moving the transparency to an effective distance from the mirror corresponding to the distance from the mirror to the work piece whereby the image will appear to be superimposed on the work piece notwithstanding that the degree of illumination of the work piece exceeds the level of target image illumination.

REFERENCES:
patent: 2472809 (1949-06-01), Decker
patent: 2942345 (1960-06-01), Goldberg
patent: 3175458 (1965-03-01), Da Costa
patent: 3558212 (1971-01-01), Ritchie
patent: 3582178 (1971-06-01), Boughton
patent: 3615124 (1971-10-01), Blankenburg
Baron et al., "Aligning Semiconductor Masks," IBM Technical Disclosure Bulletin, vol. 13, No. 7, Dec. 1970, pp. 1816-1817.

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