Target configurations for increasing the size of films prepared

Details Target configurations for increasing the size of films prepared Target configurations for increasing the size of films prepared

1993-06-23

1995-07-11

Albritton, C. L.

Electric heating

Metal heating

By arc

21912169, 427596, B23K 2600

Patent

active

054323134

ABSTRACT:
Uniform films deposited on substrates by laser ablation of targets are inased in size by configuring irradiated target areas as curves rather than flat surfaces. Since material ejected from the target area leaves in a direction normal to the target area, a curved surface results in the material following a trajectory which is at an acute angle to the surface of the substrate being coated. This results in a cone of ejected material which diverges, thus covering an area larger than the irradiated target area. The irradiated target area may be convex, concave or be comprised of a plurality of juxtaposed convex surfaces.

REFERENCES:
patent: 4281030 (1981-07-01), Silfvast
patent: 4758388 (1988-07-01), Hamada et al.
patent: 5064520 (1991-11-01), Miyake et al.
patent: 5084300 (1992-01-01), Zander et al.

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