Tapered-width micro-cantilevers and micro-bridges

Details Tapered-width micro-cantilevers and micro-bridges Tapered-width micro-cantilevers and micro-bridges

2005-04-05

2005-04-05

Donovan, Lincoln (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

06876283

ABSTRACT:
The invention provides tapered-width micro-cantilevers and micro-bridges that give additional design parameters for controlling and synthesizing pull-in (i.e., actuation) voltages. The pull-in voltage of a tapered-width micro-cantilever is generally a function of the taper function of the width along the length, the initial width, and the length of the micro-cantilever. By controlling these design parameters, a specific pull-in voltage for a micro-cantilever is obtained. The formula for a pull-in voltage is determined based on the geometry of the micro-cantilever device and a plurality of derived pull-in voltages. The pull-in voltage is derived by iteratively solving a displacement vector as a function of applied voltage across the micro-cantilever device and setting the pull-in voltage to the voltage at which the solution does not converge. The formula is derived for linear-tapered width, parabolic-tapered width and exponential-tapered width micro-cantilevers.

REFERENCES:
patent: 5367136 (1994-11-01), Buck
patent: 5578976 (1996-11-01), Yao
patent: 6307452 (2001-10-01), Sun
patent: 6445106 (2002-09-01), Ma et al.
patent: 6531668 (2003-03-01), Ma
patent: 6535091 (2003-03-01), Bechtle et al.
patent: 6624720 (2003-09-01), Allison et al.

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