Tapered electrode in an acoustic resonator

Details Tapered electrode in an acoustic resonator Tapered electrode in an acoustic resonator

2005-08-02

2005-08-02

Tan, Vibol (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000, C310S312000, C310S322000, C310S324000

Reexamination Certificate

active

06924717

ABSTRACT:
An apparatus and method to provide a tapered electrode in an acoustic resonator. A piezoelectric (PZ) layer, such as Aluminum Nitride (AIN), is formed over a bottom electrode having a tapered end. A top electrode is positioned on the PZ layer. The tapered end of the bottom electrode creates a mild topography to the under layer of the PZ material to prevent cracking in the PZ layer. The tapered end also decreases acoustic losses in the acoustic resonator because the PZ grains are highly oriented. In one embodiment, the acoustic resonator is a film bulk acoustic resonator (FBAR).

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