Tapered cantilever beam for sensors

Details Tapered cantilever beam for sensors Tapered cantilever beam for sensors

1990-10-22

1993-05-11

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73517B, 361280, 324658, G01P 15125

Patent

active

052091171

ABSTRACT:
A method of making a sensor with a mass (14) that is supported by at least one tapered cantilever beam (11). Tapered cantilever beam or beams (11) can be used in either capacitive or piezo-resistive structure. Increased sensitivity and decreased fragility is obtained by using the tapered cantilever beam.

REFERENCES:
patent: 2322681 (1943-06-01), Zenor
patent: 4660418 (1987-04-01), Greenwood et al.
patent: 4676104 (1987-06-01), Cullen
patent: 4891985 (1990-01-01), Glenn
patent: 4922756 (1990-05-01), Henrion
patent: 4987781 (1991-01-01), Reimann
patent: 5081867 (1992-02-01), Yamada
patent: 5095752 (1992-03-01), Suzuki et al.

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