Coherent light generators – Particular active media – Semiconductor
Patent
1994-05-31
1996-11-12
Bovernick, Rodney B.
Coherent light generators
Particular active media
Semiconductor
385 14, 385 43, 385130, G02B 612
Patent
active
055747426
ABSTRACT:
The present invention is directed to a semiconductor waveguiding structure which includes a) a first semiconductor waveguiding layer formed on a substrate, b) a barrier layer that is formed on the first semiconductor waveguiding layer, and that is resistant to a selected etchant, and c) a second semiconductor waveguiding layer that is etched using the selected etchant such that its width is tapered along its length to a pointed edge. A separate etching of the first semiconductor layer is performed to form each sidewall of the first semiconductor layer. The intersection of those sidewalls defines the pointed edge which has a radius of curvature of less than 500 Angstroms.
REFERENCES:
patent: 4932032 (1990-06-01), Koch et al.
patent: 5078516 (1992-01-01), Kapon et al.
patent: 5121182 (1992-06-01), Kuroda et al.
patent: 5260822 (1993-11-01), Missaggia et al.
patent: 5434943 (1995-07-01), Dentai et al.
"Tapered Waveguide InGaAs/InGaAs Multiple-Quantum-Well Lasers" by U. Koven, G. Eisenstein, M. G., Young, M. Oron, C. R. Giles, and B. I. Miller Published in IEEE Photonics Technology Letters, vol. 2, No. 2 Feb. 1990.
"A New Structure for High Power TW-SLA" by G. Bendelli, K. Komori, S. Arai, and Y. Suematsu, published in IEEE Photonics Technology Letters, vol. 3, No. 1 Jan. 1991.
"Short-Cavity Distributed Bragg Reflector Laser with an Integrated Tapered Output Waveguide" by M. Chien, U. Koren, T. L. Koch, B. I. Miller, M. Oron, M. G. Young, and J. L. Demiguel. Published in IEEE Photonics Technology Letters, vol. 3, No. 5, May, 1991.
"Efficient Coupling of a Semiconductor Laser to an Optical Fiber by Means of a Tapered Waveguide on Silicon" by Y. Shani, C. H. Henry, R. C. Kistler, K. J. Orlowsky and D. A. Ackerman. Published in Applied Phys. Letter 55 (23), on Dec. 4, 1989.
"Low-Loss Fibre-Chip Coupling by Buried Laterally Tapered InP/InGaAsP Waveguide Structure" by R. Zengerle, H. Bruckner, H. Olzhausen and A. Kohl. Published in Electronics Letters on Mar. 26, 1992, vol. 28, No. 7.
"Photonic Integrated Circuits" by T. L. Koch and U. Koren, AT&T Bell Laboratories, Holmdel, New Jersey 07733. (no date available).
Ben-Michael Rafael
Koren Uziel
Bovernick Rodney B.
Lucent Technologies - Inc.
Song Yisun
LandOfFree
Tapered beam expander waveguide integrated with a diode laser does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Tapered beam expander waveguide integrated with a diode laser, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Tapered beam expander waveguide integrated with a diode laser will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-569126