Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2005-10-25
2005-10-25
Dang, Phuc T. (Department: 2818)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S396000, C438S923000
Reexamination Certificate
active
06958257
ABSTRACT:
Described is a method for producing high purity tantalum, the high purity tantalum so produced and sputtering targets of high purity tantalum. The method involves purifying starting materials followed by subsequent refining into high purity tantalum.
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LaRue Wesley
Ozturk Bahri
Rosenberg Harry
Wang Guangxin
Dang Phuc T.
Honeywell International , Inc.
Wells St. John P.S.
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