Tantalum oxide antireflective coating and method of forming same

Details Tantalum oxide antireflective coating and method of forming same Tantalum oxide antireflective coating and method of forming same

1976-11-10

1979-05-29

Weisstuch, Aaron

Batteries: thermoelectric and photoelectric

Thermoelectric

Radiation pyrometer

427162, H01L 3106

Patent

active

041566220

ABSTRACT:
A silicon solar energy cell having an antireflective coating on its light impinging surface. The coating consists essentially of a suboxide of tantalum having the generic formula Ta.sub.2 O.sub.y, in which y is a number between about 2.5 and 4.8 on an atomic ratio basis.

REFERENCES:
patent: 3533850 (1970-10-01), Tarneja et al.
patent: 3904453 (1975-09-01), Revesz et al.
patent: 3922774 (1975-12-01), Lindmayer et al.
A. G. Revesz et al., "Film-Substrate Interaction in Si/Ta and Si/Ta.sub.2 O.sub.5 Structures", J. Electrochem. Soc., vol. 123, pp. 1514-1519, Oct. 1976.
A. G. Revesz, "Vitreous Oxide Antireflection Films in High-Efficiency Solar Cells", Conf. Record, 10th IEEE Photospecialists' Conf., Nov. 1973, pp. 180-181.

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