Coating processes – Electrical product produced – Metal coating
Reexamination Certificate
2006-07-07
2008-10-28
Parsa, Jafar (Department: 1621)
Coating processes
Electrical product produced
Metal coating
C427S123000, C548S101000
Reexamination Certificate
active
07442407
ABSTRACT:
Tantalum and niobium compounds having the general formula (I) and their use for the chemical vapour deposition process are described:whereinM stands for Nb or Ta,R1and R2C1to C12alkyl, C5to C12cycloalkyl, C6to C10aryl radicals, 1-alkenyl, 2-alkenyl, 3-alkenyl, triorganosilyl radicals —SiR3, or amino radicals NR2R3is C1to C8alkyl, C5to C10cycloalkyl, C6to C14aryl radical, or SiR3or NR2,R4denotes Cl, Br, I, NIH—R5where R5is C1to C8alkyl, C5to C10cycloalkyl or C6to C10aryl radical, or O—R6where R6=optionally substituted C1to C11alkyl, C5to C10cycloalkyl, C6to C10aryl radical, or —SiR3, or BH4, or an allyl radical, or an indenyl radical, or an benzyl radical, or an cyclopentadienyl radical, or —NIR—NR′R″ (hydrazido(-1), wherein R, R′ and R″ have the aforementioned meaning of R, or CH2SiMe3, pseudohalide, or silylamide —N(SiMe3)2, andR7and R8are H, C1to C12alkyl, C5to C12cycloalkyl or C6to C10aryl radicals.
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Merkoulov Alexei
Ochs Thomas
Pokoj Michael
Reuter Knud
Stolz Wolfgang
Connolly Bove & Lodge & Hutz LLP
H.C. Starck GmbH
Parsa Jafar
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