Tantalum and niobium compounds

Details Tantalum and niobium compounds Tantalum and niobium compounds

2008-10-10

2010-02-23

Aulakh, Charanjit S (Department: 1625)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heterocyclic carbon compounds containing a hetero ring...

C556S042000, C549S003000

Reexamination Certificate

active

07667038

ABSTRACT:
The present invention relates to specific, novel tantalum and niobium compounds which can serve as starting materials for the preparation of chemical vapour deposition (CVD) precursors.

REFERENCES:
patent: 5591483 (1997-01-01), Winter et al.
patent: 6593484 (2003-07-01), Yasuhara et al.
patent: 2004/0142555 (2004-07-01), Kamepalli et al.
patent: WO-00/65123 (2000-11-01), None

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