Tantalum-aluminum oxide coatings for semiconductor devices

Details Tantalum-aluminum oxide coatings for semiconductor devices Tantalum-aluminum oxide coatings for semiconductor devices

1996-11-27

1998-09-01

Davie, James W.

Coherent light generators

Particular active media

Semiconductor

H01S 319

Patent

active

058020918

ABSTRACT:
An active semiconductor device includes a coating comprising an oxide of tantalum and aluminum. The coating may function as an AR coating or as a passivation coating. Applications to ICs and optical devices are described.

REFERENCES:
patent: 4372987 (1983-02-01), Ganner et al.
patent: 4749255 (1988-06-01), Chakrabarti et al.
patent: 5144635 (1992-09-01), Suhara
Medium-Index Mixed Oxide Layers for Use in AR-Coatings, SPIE, vol. 662, Thin Film Technologies (1986) Peter Ganner, pp. 69-76 (No Month).

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