Tangential flow pumping channel for turbomolecular pumps

Details Tangential flow pumping channel for turbomolecular pumps Tangential flow pumping channel for turbomolecular pumps

1994-06-24

1995-09-12

Look, Edward K.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

415 553, F04D 1904

Patent

active

054492700

ABSTRACT:
The present invention relates to turbomolecular pumps comprising one or more tangential flow pumping stages in addition to axial flow pumping stages, so as to raise the pump exhaust pressure up to the atmospheric pressure, wherein at least one tangential flow pumping stage having a tangential flow pumping channel of improved design. The channel is located between the lateral surface of the rotor disk and the annular inner wall of stator and comprises an upper closure plate provided with suction port and a lower closure plate provided with diskharge port wherein these ports operably coupled to the tangential flow pumping channel. The cross-section area of the channel is enlarged from its periphery portion defined by the lateral surface of the rotor disk to a central portion defined by the upper and lower closure plates.

REFERENCES:
patent: 5020969 (1991-06-01), Mase et al.
patent: 5238362 (1993-08-01), Casaro et al.
patent: 5374160 (1994-12-01), Hablanian
patent: 5387079 (1995-02-01), Levi

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