Table stabilization assembly

Details Table stabilization assembly Table stabilization assembly

1986-10-01

1988-08-30

Hix, L. T.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

G03B 2752

Patent

active

047680652

ABSTRACT:
A table stabilization assembly is disclosed. The assembly is intended for use in a microlithography system which includes a stable for supporting a movable stage and a frame support for supporting the table. The assembly includes a pair of brake leaves which are respectively attached to the table and frame support and which are clamped together during stage acceleration or deceleration to provide stabilization.

REFERENCES:
patent: 4425037 (1984-01-01), Hershel et al.
patent: 4431494 (1984-02-01), McIntyre et al.

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