Table device, film-forming apparatus, optical element,...

Details Table device, film-forming apparatus, optical element,... Table device, film-forming apparatus, optical element,...

2004-04-05

2008-10-07

Tadesse, Yewebdar T (Department: 1792)

Coating apparatus

Projection or spray type

Work-supported and guided carriage

C118S500000, C118S300000, C347S055000, C279S128000

Reexamination Certificate

active

07431770

ABSTRACT:
A table device for chucking a substrate includes a chucking unit including a porous body, and having a substrate chucking surface, and a conductive film which is disposed on the substrate chucking surface of the chucking unit, and which is grounded.

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Communication (with translation) from Chinese Patent Application re: related application.

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