Ta/W film as heating device for dynamic fly height adjustment

Details Ta/W film as heating device for dynamic fly height adjustment Ta/W film as heating device for dynamic fly height adjustment

2008-06-30

2011-11-08

Blouin, Mark (Department: 2627)

Dynamic magnetic information storage or retrieval

Fluid bearing head support

Disk record

Reexamination Certificate

active

08054583

ABSTRACT:
A dynamic fly heater (DFH) for improved lifetime and better film uniformity is disclosed for a magnetic head. The heater has a lower amorphous Ta layer and an upper W layer to promote small grain size and reduced electro-migration. The composite film is especially advantageous for heaters greater than 1000 Angstroms thick where dR/R is difficult to control in the prior art. The DFH may be a (Ta/W)nlaminate in which the Ta layers are about 30 Angstroms thick and the combined thickness of the W layers is from 400 to 1200 Angstroms. A Ta film is preferably sputter deposited with an Ar pressure of 3 to 5 mTorr and the W film is sputter deposited in the same chamber with a 3 to 20 mTorr Ar pressure. In one embodiment, a merged read/write head has one DFH in the read head and a second DFH in the write head.

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Co-pending U.S. Appl. No. 12/080,276, filed Apr. 2, 2008, “Vertically Stacked DFH Heater Design for Protrusion Shape Control.”

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