Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1998-05-21
2000-05-16
Kim, Robert H.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
356399, 430 22, G01B 902
Patent
active
060644869
ABSTRACT:
Systems, methods and computer program products detect a position of a new alignment mark on a substrate by producing an alignment signal model from sample alignment signals and fitting the new alignment signal to the alignment signal model. The alignment signal model may be produced from the multiple sample alignment signals using singular value decomposition, based on subspace decomposition of the alignment signals. By producing an alignment signal model from multiple sample alignment signals, asymmetries in the sample alignment marks and/or in the coatings that are fabricated on the sample alignment marks, may be taken into account when detecting the position of a new alignment mark.
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Chen Xun
Ghazanfarian Amir A.
Kailath Thomas
McCord Mark A.
Pease R. Fabian W.
Kim Robert H.
Lee Andrew H.
Leland Stanford Junior University
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