Systems, methods, and apparatus of a low conductance silicon...

Details Systems, methods, and apparatus of a low conductance silicon... Systems, methods, and apparatus of a low conductance silicon...

2011-04-12

2011-04-12

Vinh, Lan (Department: 1713)

Etching a substrate: processes

Forming or treating electrical conductor article

Adhesive or autogenous bonding of self-sustaining preforms

C216S008000, C216S013000, C250S288000

Reexamination Certificate

active

07922920

ABSTRACT:
Systems, methods and apparatus are provided through which in some embodiments a mass spectrometer micro-leak includes a number of channels fabricated by semiconductor processing tools and that includes a number of inlet holes that provide access to the channels.

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