Systems for wafer level burn-in of electronic devices

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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10486672

ABSTRACT:
In one example, a wafer level burn-in system includes a first electrode plate for providing electrical contact simultaneously to contacts of a group of semiconductor devices borne by a semiconductor wafer on a device surface of the semiconductor wafer. A second electrode plate is employed for providing electrical contact to a substrate surface of the semiconductor wafer. Finally, an electrical power generator is employed for providing electrical power to the group of semiconductor devices through the contacts and the substrate of the semiconductor wafer through the first and second electrode plates.

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“Full-Wafer Burn-In of Diode Lasers”, IBM Technical Disclosure Bulletin, IBM Corp. New York, NY. vol. 35, No. 4A, Sep. 1, 1992, pp. 487-489.

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