Systems for supporting ceramic susceptors

Details Systems for supporting ceramic susceptors Systems for supporting ceramic susceptors

2006-04-04

2006-04-04

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S405000, C219S411000, C219S444100, C219S443100, C219S446100, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100

Reexamination Certificate

active

07022947

ABSTRACT:
A support structure for supporting a ceramic susceptor in a chamber is provided. The support structure includes a supporting portion joined with a back face of the ceramic susceptor. The supporting portion includes an inner space that is separated from the atmosphere of the chamber. A cooling system is provided below the supporting portion 6. At least one thermal control portion is provided between the cooling system and the supporting portion for reducing thermal conduction from the susceptor to the cooling system.

REFERENCES:
patent: 6261708 (2001-07-01), Ohashi et al.
patent: 6705394 (2004-03-01), Moslehi et al.
patent: 05-326112 (1993-12-01), None
patent: 2001-250858 (2001-09-01), None
U.S. Appl. No. 11/064,406, filed Feb. 23, 2005, Goto et al.

Affiliated with

Also associated with

Rating

Systems for supporting ceramic susceptors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Systems for supporting ceramic susceptors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Systems for supporting ceramic susceptors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3598766