Systems for producing semiconductors and members therefor

Details Systems for producing semiconductors and members therefor Systems for producing semiconductors and members therefor

2007-05-22

2007-05-22

Kackar, Ram N. (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C156S345300, C118S715000, C204S298010

Reexamination Certificate

active

10753625

ABSTRACT:
The present invention provides members that are provided around a susceptor for mounting a semiconductor in a chamber for a semiconductor production system. Each member has a function of independently generating heat to heat the semiconductor, at least by radiation, and preferably, a heat generating element is embedded in each member.

REFERENCES:
patent: 5798016 (1998-08-01), Oehrlein et al.
patent: 6171438 (2001-01-01), Masuda et al.
patent: 2001/0054381 (2001-12-01), Umotoy et al.
patent: 05275385 (1993-10-01), None
patent: 05-326112 (1993-12-01), None
patent: 2001-274103 (2001-10-01), None

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