Systems for producing semiconductors and members therefor

Details Systems for producing semiconductors and members therefor Systems for producing semiconductors and members therefor

2007-01-02

2007-01-02

Pelham, Joseph M. (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C392S418000, C118S725000

Reexamination Certificate

active

10753583

ABSTRACT:
A member provided around a susceptor for mounting a semiconductor in a chamber of a semiconductor production system. The member has a face opposing the susceptor and a center line average surface roughness of the face opposing the susceptor is 0.5 μm or less. Alternatively, the face opposing the susceptor has a thermal emissivity ε of 0.5 or lower. The member can also be a liner [4] having a supported face [4] whose area is not more than 20 percent of that of the face [4] opposing the susceptor.

REFERENCES:
patent: 5872889 (1999-02-01), Kaltenbrunner et al.
patent: 6407368 (2002-06-01), Hsu et al.
patent: 6442950 (2002-09-01), Tung
patent: 6537422 (2003-03-01), Sakuma et al.
patent: 6709523 (2004-03-01), Toshima et al.
patent: 6741804 (2004-05-01), Mack et al.
patent: 05-326112 (1993-12-01), None

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