Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2007-01-02
2007-01-02
Pelham, Joseph M. (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C392S418000, C118S725000
Reexamination Certificate
active
10753583
ABSTRACT:
A member provided around a susceptor for mounting a semiconductor in a chamber of a semiconductor production system. The member has a face opposing the susceptor and a center line average surface roughness of the face opposing the susceptor is 0.5 μm or less. Alternatively, the face opposing the susceptor has a thermal emissivity ε of 0.5 or lower. The member can also be a liner [4] having a supported face [4] whose area is not more than 20 percent of that of the face [4] opposing the susceptor.
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patent: 05-326112 (1993-12-01), None
Goto Yoshinobu
Tsuruta Hideyoshi
Burr & Brown
NGK Insulators Ltd.
Pelham Joseph M.
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