Systems for measuring stresses in line features formed on...

Details Systems for measuring stresses in line features formed on... Systems for measuring stresses in line features formed on...

2005-08-02

2005-08-02

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559220

Reexamination Certificate

active

06924497

ABSTRACT:
Methods and systems for evaluating stresses in line features formed on substrates. Stresses may be computed from measured curvature information based on simple analytical functions. The curvature information can be obtained optically by, e.g., a coherent gradient sensing method, to obtain a full-field measurement of an illuminated area.

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patent: 05-335217 (1993-12-01), None
L.B. Freuend, “Substratc Curvature Due to Thin Film Mismatch Strain In the Nonlinear Deformation Range”, Division of Engineering, Brown University, Providence, RI 02912, Jan. 1999.

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