Systems for managing production information

Details Systems for managing production information Systems for managing production information

2007-11-20

2007-11-20

Nguyen, Sang H. (Department: 2886)

Data processing: measuring, calibrating, or testing

Testing system

C702S035000, C702S082000, C702S182000, C714S724000, C356S237500, C250S559450

Reexamination Certificate

active

11648629

ABSTRACT:
A system for managing production information includes a defect information database, a defect information collection unit, and a manufacturing apparatus information managing unit. The defect information database stores defect information including a coordinate value of a defect portion and a defect feature amount which are detected by inspecting a specimen processed in a device manufacturing line by using an optical inspection apparatus having an ultraviolet light source. The defect information collection unit at least one of collates and retrieves defect information from the defect information database and judges a fatality of a defect. The manufacturing apparatus information managing unit which processes information stored in the defect information collection unit and stores information on transition of yield and maintenance condition of a manufacturing apparatus in the device manufacturing line.

REFERENCES:
patent: 4595289 (1986-06-01), Feldman
patent: 4769523 (1988-09-01), Tanimoto
patent: 4974919 (1990-12-01), Muraki
patent: 5038048 (1991-08-01), Maeda
patent: 5278012 (1994-01-01), Yamanaka et al.
patent: 5430548 (1995-07-01), Hiroi et al.
patent: 5479252 (1995-12-01), Worster et al.
patent: 5539752 (1996-07-01), Berezin et al.
patent: 5649169 (1997-07-01), Berezin et al.
patent: 5649922 (1997-07-01), Maeda
patent: 5764363 (1998-06-01), Ooki et al.
patent: 5774222 (1998-06-01), Maeda
patent: 5783342 (1998-07-01), Yamashita et al.
patent: 5822055 (1998-10-01), Tsai
patent: 5917332 (1999-06-01), Chen et al.
patent: 6031201 (2000-02-01), Amako
patent: 6034776 (2000-03-01), Germer
patent: 6256092 (2001-07-01), Tomita
patent: 6263099 (2001-07-01), Maeda et al.
patent: 6268093 (2001-07-01), Kenan
patent: 6369093 (2002-04-01), Karpol
patent: 6400454 (2002-06-01), Noguchi et al.
patent: 6456951 (2002-09-01), Maeda et al.
patent: 6542830 (2003-04-01), Mizuno et al.
patent: 6546308 (2003-04-01), Takagi et al.
patent: 6556290 (2003-04-01), Maeda et al.
patent: 6580502 (2003-06-01), Kuwabara
patent: 6621571 (2003-09-01), Maeda
patent: 6643006 (2003-11-01), Hsu et al.
patent: 6799130 (2004-09-01), Okabe et al.
patent: 7062081 (2006-06-01), Shimoda et al.
patent: 61-61189515 (1986-08-01), None
patent: 62-073141 (1987-04-01), None
patent: 01-187437 (1989-07-01), None
patent: 03-099482 (1991-04-01), None
patent: 4-111336 (1992-04-01), None
patent: 01-281130 (1993-10-01), None
patent: 7-083844 (1995-03-01), None
patent: 7-318326 (1995-12-01), None
patent: 11-311608 (1999-11-01), None
patent: 2000-323542 (2000-11-01), None
patent: 2001-194323 (2001-07-01), None

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